工業污染防治第 110 期(July 2009) 105 製程 VOCs 廢氣之收集與處理林文川* 摘要現有法規對空氣污染物的管制，已由早期傳統性污染物如粒狀物、SOx 、NOx，漸次轉移比重到 VOCs。工業製程運用有機溶劑相當普遍，大多數工業製程都不免有 VOCs 污染問題。工廠如何從眾多處理技術中，選採經濟有效之控制設備，為工廠管理者或專責人員執行環保工作之重要課題。本文介紹 VOCs 廢氣之收集及處理技術，因 VOCs 污染源大多具有逸散特性，故說明局部排氣系統及氣罩應有的作為。而控制技術則包括燃燒式控制 ( 直接焚化、觸媒焚化) 及非燃燒式控制( 吸附、冷凝、吸收及生物處理) 等 2 大類，除先從整體面做特性、優缺點及其設計因子之比較外，亦逐項說明各項技術，包括處理原理與應用、設備概述、主要設計參數或影響性能因素及操作注意事項等，提供業者選用防制技術及設備操作維護之參考，以因應日趨嚴格之環保標準。【關鍵字】揮發性有機物、VOCs 、局部排氣系統、氣罩、廢氣收集、控制技術、焚化、吸附 *傳閔工程股份有限公司總經理

製程 VOCs 廢氣之收集與處理 - SIPA

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Microsoft Word - 110.doc VOCs

(

*

SOxNOx(volatile organic compounds, VOCs)
VOCs
( O3)
VOCs
VOCs

VOCs

2.1
VOCs
()

1 VOCs
()
98 3
2.3
5. VOCs
7.( )
5.
6.
3
VOCs

81 11
VOCs
2 (a) 300m3/min
2 (b)
80m3/min
110 (July 2009) 111
VOCs

2
()
1.
(A)
(E)(D)
(C)(B)
3
3.VOCs
7.()

98 3
1.(taper)60°
2.(splitter vanes)

X
D XD W X1.5W
110 (July 2009) 115
(2006 ) 95
4
5
W/L0.2 Q3.7LVX
W/L0.2 Q2.8 LVX
0.2 QV (10X2A)
0.2 Q0.75V (10X2A)
110 (July 2009) 117
5 ()
QVAVWH

Q1.4PDV
P
D
3.5

2.
6

(1)
(2) (1) 4.
6 ()

(1)
VOCs
(2)

8 VOCs (2)
(1) (2)
1. (2) (1) (2)
2.
96 12
(5)
W) 1.5 W
(6)
(7)
(10)
(11)

(2)
480 ( )
200~260 2.6mm
76mm 480 870~980
980 870

(3)
(4)

()

5.7(5)

3.8 1.

( )
0.4~0.8m/sec
0.7~1.3m/sec

97 3

A.

B.
8

C.

D.

7

70

VOCs
70%

38

pH
4.2 VOCs

128 VOCs

9 VOCs
VOCs

VOCs
(650850)(

regenerative)
85% 10

10

(1)()
11
(1)3T
1,370
650~850 0.3~0.5 3~15m/s
VOCs 99%

VOCs

8
() ( ) () 0.45 640 80 695 99.6
0.3 720 0.5 550
0.5 700 0.5 700 98
1.0 650 650 92
735 97 * 0.30.5 590680 90
0.30.5 680820 90 * 90 760820 93 12
110 (July 2009) 133
9
85
(3)

92
G.

800 1,000
NOx

()

)
(PtPdAgAu)(Cr2O3
CuONiOMnO2)

( Al)
12
2.
(1)
NOx

12

315450

)VOCs 450
3×10412×104 m3/m3 hrVOCs 95
VOCs 97.998.5
12
( )
(2)
A.
C.

13

90 (hr-1) 95 (hr-1) 40,000 30,000 15,000 10,000
92
D.
()

14
E.
35 160 50 210 70 385
92
(3)

G.

ClBrS SiPPb
PbCdHg
--
110 (July 2009) 141
5.1.4
14

20 85 95
400 500mmH2O
100%

13 (3 )
14 ()
2.
(1)
15%LEL RTO
B. 90% 40 RTO

50
100~200ppm)+RTO

RTO
70% RTO

(2)

VOCs
RTO 3 RTO

16 RTO
2 3 2.4~2.7m(1"95%) () 2.4~3.0 1"(7~70 /)(1.5 mm t) 0.6~1.1 160~820 m2/m3 60~74% 760~816
0.5~1.0 m/s (=÷)
250~500 mmH2O 95% VOCs <15% LEL VOCs 99%(3 )98%(2 ) 0.5~2.0 min()
10 Hp/100 Nm3/min() 20 Hp/100 Nm3/min()
/ 93 12
110 (July 2009) 145
(3)
A. ( hexamethy1
disilazane(CH3)3SiNHSi(CH3)3) (
)(
)(
)
B.(bake out)

()( 50)

110 (July 2009) 147

() () () 120130 100110 150160
60120min 1015 min 3060 min 97 99 95
() 10 ppm 1 ppm 10 ppm
(kg /kg ) 17 15 ()00.2
VOC 82 9
5.2.2

16
17

18
17
18

1. 2. 3. 4. 5. 6.

93 12
150 VOCs

(C14)

(3)
C1C2 Co
( C3)

VOCs ppm

40
50
(2)

)

channeling)

G.

5.3

3/4 1/4
VOCs
VOCs

3.
19
19

4.
60,000m3/hr 3,500mm 3,500mm
120,000m3/hr
5,000mm 3,500mm
10

VOCs

VOCs (PGMEA
DMSO )
SSR

20
20
(1) (2)(SEM*)
* SEMscanning electron microscope 93 12
21
20

(2)
A.(channeling)
(C)
(D) N2 N2 N2

5.4
5.4.1
1.

(1)(2)

VOCs
VOCs
110 (July 2009) 161
) ( )
21
22

(shell-and-tube condensors)

1.

2.

(2540 ) VOCs
10,00020,000ppm VOCs

() 347
( Freon-12) 6834 86 5
110 (July 2009) 163
3.
(1)

10,000ppm(1) 90
B. VOCs

C.

VOCs

110 (July 2009) 165
5 4 0

(atm/mol/m3)
(atm/mol/m3)
MEK 0.00013 Toluene 0.0064201
Ethyl Acrylate 0.000254 m-Xylene 0.0074341 VOCs 98 3
3.
(1)
transfer unitHTU)
5.6
5.6.1
2-)

()

10
10-1
1
93 12
23 VOCs
5.6.2
(1)
1.0~1.5 4.0~4.5m

VOCs

1.< 0.5g/m3
2. H 2 < 1 1. < 5g/m3 2. H 2 < 0.01

24 ()
1 (kg/m3)

1. 2.
VOCs 3. 4. 5. 6.
1.
) 3.
3. 4. 5.

2.H()[g/m3]gas phase / [g/m3]liquid phase 3.
89 12
170 VOCs
24
110 (July 2009) 171

93 12
(2)
VOCs
( BOD) (leachate)

pH

pH
pH pH
7~8
93 12

1.
5.(2006)95
15.VOC 916