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ADL Analoge & Digitale Leistungselektronik GmbH Bunsenstraße 30 D 64293 Darmstadt / Germany Tel. +49 (0) 6151 860 72-0 Fax +49 (0) 6151 860 72-70 www.adl-gmbh.com Katalog Catalogue 2012 + DC-Power Supplies + Pulsed DC Generators + Middle Frequency + Bipolar Generators

Katalog Catalogue 2012 - · PDF file Katalog Catalogue 2012 ... Additionally to the series production ADL also offers special power supplies on ... 11 Luftgekühlte DC

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ADL Analoge & DigitaleLeistungselektronik GmbH

Bunsenstraße 30D 64293 Darmstadt / GermanyTel. +49 (0) 6151 860 72-0Fax +49 (0) 6151 860 72-70

www.adl-gmbh.com

KatalogCatalogue

2012

+ DC-Power Supplies + Pulsed DC Generators

+ Middle Frequency + Bipolar Generators

ADL - Leistungselektonik “Made in Germany”

ADL ist Entwickler und Hersteller von Strom-versorgungen und Generatoren für Dünn-filmbeschichtung sowie Leistungselektronik für spezielle Industrieanwendungen und For-schungseinrichtungen.

1992 wurde die ADL Analoge & Digitale Leistungselektronik GmbH in Riedstadt / Hessen gegründet.

2001 eröffnete ADL einen zweiten Standort in Groß-Gerau, um die Produktionskapazitäten zu vergrößern.

2011 erfolgte der Umzug beider Standorte nach Darmstadt (nahe Frankfurt/Main) in ein wesent-lich größeres Firmengebäude.

Unsere Produkte sind bekannt für ihre Zuverläs-sigkeit, Langlebigkeit und hohe Fertigungsquali-tät, aber auch für technisch innovative Konzepte. Wir nehmen die Bezeichnung „Made in Germany“ ernst und verfügen über eine sehr umfangreiche eigene Fertigung, vom Bau von Transformatoren über die Kabelkonfektionierung, die Elektro-nikbestückung, die Baugruppenfertigung und Endmontage bis zur eigenen Mechanikfertigung mit modernsten CNC-Maschinen.

DC-Power Supplies - Pulsed DC Generators - Middle Frequency - Bipolar Generators

ADL – Power Electronics “Made in Germany”

ADL is developer and manufacturer of power supplies and generators for thin film coating, as well as for power electronics for special industrial applications and research institutes.

1992 ADL Analoge & Digitale Leistungselektronik GmbH was founded in Riedstadt / Hessen.

2001 ADL opened a second plant in Groß-Gerau to enlarge the production capacities.

2011 both locations moved to the city of Darm-stadt (near Frankfurt/Main) into a much larger factory building.

Our products are well known for their reliabili-ty, longevity and highest production quality, as well for very innovative technical concepts. We take the designation „Made in Germany“ very seriously: ADL has a very broad own production, such as the manufacture of transformers, cable termination, module assembling, final mounting, PCB-mounting and our own mechanical produc-tion with modern CNC machines.

Prozess ADL PowerSupplies Process

Sputtern, Ätzen, Ionenquellen DC Power Supplies Sputtering, Etching, Ion Sources

Aufdampfen, Hg-Lampen, Heizen AC Power Supplies* Evaporation, Hg-Lamps, Heating

Reaktiv Sputtern Pulsed DC Generators Reacitve Sputtering

Reaktiv Sputtern, Middle Frequency and Reactive Sputtering, Großflächenbeschichtung bipolar Generators Large Area Coating

Magnetfeldmodulation AM Generators* Magnetic Field Modulation

* Auf Anfrage * On Request

3

DC-Power Supplies - Pulsed DC Generators - Middle Frequency - Bipolar Generators

ADL Leistungselektronik für höchste AnforderungenADL Power Electronics for highest demands

Innovativ, kompakt, solide - von 1992 bis 2012 und in Zukunftinnovative, compact, clear design - from 1992 until 2012 and inthe future

Zuverlässige Kühlung auch bei hohen UmgebungstemperaturenReliable cooling - even in hotambient temperature

„Plug and Play“ Einfache Bedienung durch automatisierte Funktionen„Plug and Play“ Easy handlingthrough fully automatic functions

Übersichtliche Information durch LED-DigitalanzeigenClear information through LED-digital display

Sichere Verbindung und schnelle Montage durch genormte IndustriesteckverbindungenSave connection and fast mounting through standardized industry connectors

The series TS is not build any longer, but power supplies are still running world wide

Stabile GehäuseStable housing

1992 TS 30

2012

HX 300

4

DC-Power Supplies - Pulsed DC Generators - Middle Frequency - Bipolar Generators

Neben unseren Seriengeräten bieten wir auch kundenspezifische Sondergeräte an, die in diesem Katalog nicht enthalten sind.

Additionally to the series production ADL also offers special power supplies on customer request, which are not in this catalogue.

5

Luftgekühlte DC-Stromversorgungen 0,5 bis 15kW Air cooled DC-Power Supplies 0,5 up to 15kW

Serie Series GS 05 - GS 30 6 - 9Serie Series GS 60 - GS 150 10 - 12

Wassergekühlte DC-Stromversorgungen 5 bis 30kW Water cooled DC-Power Supplies 5 up to 30kW

Serie Series GX 50 - GX 150 14 - 17Serie Series GSW 100 - GSW 300 18 - 24Serie Series HX 150 - HX 300 26 - 30

Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

GG 03, GG 03.1 Accelerator and GG 12, GG 12.1 Beam 32 - 34GIP 10, GIP 10.1 Neutralizer 32 - 35GDI 09 Discharge 32 - 35 GC 10 Cathode 32 - 36

Unipolar Pulsgeneratoren Unipolar Pulse Generators

RD 300 38 - 39SD 150 – SD 300 40 - 42

Mittelfrequenzgenerator / Bipolar Pulsgenerator Middle Frequency Generator / Bipolar Pulse Generator

SB 300 44 - 46

ADL Zubehör ADL Accessories

Interfaces 48 Interface Combiner 48 Master Oscillator 48Plugs 49Couplings for Water Cooling 49Magnetic Valve 49Remote Control 50 Cathode Clamp Diode 50Cable 50Sales and Sercice addresses worldwide 51

DC-Power Supplies - Pulsed DC Generators - Middle Frequency - Bipolar Generators

6

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

DC-Stromversorgungen GS 05 - GS 30

Die kompakten Geräte sind für kleinere Magnetrons in Produktions- und Laboranlagen entwickelt worden. Durch die einfache und sichere Bedienbarkeit können die Stromver-sorgungen sehr flexibel eingesetzt werden. Das Arc-Handling paßt sich unterschiedlichen Prozeßparametern automatisch an, so daß kein Programmieraufwand notwendig ist. Die Geräte sind für den Einbau in 19“-Baugruppenträger konzipiert.

***Highlights

* Output power 0.5 - 3.0kW

* Air cooling

* ½ 19“–case, 3 HU

* Interchangeable interfaces

* Display for voltage, current and power

* Manual operation via frontpanel

* Automatic Arc-Handling

DC-Power Supplies GS 05 - GS 30

The compact power supplies were developed for magnetrons in production plants and labo-ratories. Easy and safe operation makes these power supplies very flexible for many processes. The arc-handling adjusts automatically to diffe-rent process parameters, so that programming is not necessary. The units are designed for the mounting in 19“-racks.

Active Frontpanel

Passive Frontpanel

Rear view

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

7

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Type DC-Output Order-No.

GS 05/800 0,5kW 800V 0,9A 03Z040 GS 10/800 1,0kW 800V 1,7A 03Z090 GS 15/800 1,5kW 800V 3A 03Z140 GS 20/800 2,0kW 800V 3,5A 03Z190 GS 30/800 3,0kW 800V 5,3A 03Z240

GS 05/1000 0,5kW 1000V 0,7A 03Z050 GS 10/1000 1,0kW 1000V 1,4A 03Z092 GS 15/1000 1,5kW 1000V 2,4A 03Z150 GS 20/1000 2,0kW 1000V 2,8A 03Z200 GS 30/1000 3,0kW 1000V 4,2A 03Z250

GS 12/2000 1,2kW 2000V 1A 03Z110

Variations

Options and Accessories Order-No.

Interface AS 4 01Y001

Profibus Interface 6.408 01Y101

Profibus Interface 7.408 01Y151

Connecting Cable for RS 232 (Profibus) 06Y005

Frontpanel active with 3 1/2 Digit Display 02Y020

Front Panel passive with3 1/2 Digit Display 02Y021

Line Voltage 3 x 200 V * 10Y015

Output Voltage floating ** 10Y020

19“ Mounting Frame for 2 Units 02Y030

* Only GS 15 and GS 20** Only GS 15, GS 20 and GS 30

8

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Technical Data GS 05 – GS 30

GS 05/800 GS 10/800 GS 15/800 GS 20/800 GS 30/800

Nominal power 0,5kW 1kW 1,5kW 2kW 3kW

Output voltage800V Plus pole grounded

Option:Minus pole grounded

Option:Floating

Output current 0,9A 1,7A 3A 3,5A 5,3A

Control Current, voltage or power controlled

Modes of operationManual via front panel or external via A/D interface AS 4,

AS 4 F or Profibus

Set point 0 … 100 % of nominal voltage, current or power

Output accuracy +/- 1 % of nominal value for voltage, current and power

Arc suppression Quenching time: 6µs up to 3ms, automatically

Delay time: 6µs up to 10ms, automatically

Indications 3½-digit display for voltage, current and power

Noise emission LpA < 70db (A)

Mains connection230V, +5/-10 %, 50/60Hz,

(Option: 200V, L1, L2, PE)

3 x 400V, +5/-10 %, 50/60Hz,

(Option: 3 x 200V, only GS 15 and

GS 20), PE

Power consumption 0,6kVA 1,2kVA 1,8kVA 2,4kVA 3,6kVA

Fusing 6A 6A 6A (10A) 6A (10A) 10A

High voltage connection RG 213

Cooling Forced air, maximum ambient temperature 40° C

Size ½ 19” slide-in, 3HU (132,5mm), 560mm deep

Weight 11kg 12kg

9

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Technical Data GS 05 – GS 30

GS 05/1000

GS 10/1000

GS 12/2000

GS 15/1000

GS 20/1000

GS 30/1000

Nominal power 0,5kW 1kW 1,2kW 1,5kW 2kW 3kW

Output voltage

1000V 2000V 1000V

Plus pole grounded

Option:Minus pole grounded

Option:Floating

Output current 0,7A 1,4A 1A 2,4A 2,8A 4,2A

Control Current, voltage or power controlled

Modes of operationManual via front panel or external via A/D interface AS 4, AS 4 F or

Profibus

Set point 0 … 100 % of nominal voltage, current or power

Output accuracy +/- 1 % of nominal value for voltage, current and power

Arc suppression Quenching time: 6µs up to 3ms, automatically

Delay time: 6µs up to 10ms, automatically

Indications 3½-digit display for voltage, current and power

Noise emission LpA < 70db (A)

Mains connection

230V, +5/-10 %, 50/60Hz,

(Option: 200V, L1, L2, PE)

3 x 400V, +5/-10 %, 50/60Hz,

(Option: 3 x 200V, only GS 15

and GS 20), PE

Power consumption 0,6kVA 1,2kVA 1,4kVA 1,8kVA 2,4kVA 3,6kVA

Fusing 6A 6A 10A 6A (10A) 6A (10A) 10A

High voltage connection RG 213

Cooling Forced air, maximum ambient temperature 40° C

Size ½ 19” slide-in, 3HU (132,5mm), 560mm deep

Weight 11kg 12kg

10

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

DC-Stromversorgungen GS 60 - GS 150

Die luftgekühlten DC-Stromversorgungen der Serie GS 60 – GS 150 gibt es in drei Bedienva-rianten: mit aktivem Frontpanel, mit passivem Frontpanel und mit Status-LEDs. Die Stromver-sorgungen können mit voller Nennleistung ohne Einschränkung der Einschaltdauer betrieben werden. Der Parallelbetrieb mehrerer Geräte ist möglich. Die Serie GS 60 – GS 150 verfügt, wie alle Stromversorgungen von ADL, über eine extrem schnelle, automatische Arc-Löschung. Die Bedienung der Geräte ist sehr einfach und sicher.

***Highlights

* Output power 6.0 - 15kW

* Air cooling

* 19“–case, 3 HU

* Floating output

* Joule mode

* Automatic Arc-Handling

DC-Power Supplies GS 60 - GS 150

The air cooled DC power supplies of the series GS 60 – GS 150 are available in three different versions: with active front panel, with passive front panel and with status LEDs. The power supplies can be operated with full nominal po-wer without limitation of the duty cycle. Parallel operation of several power supplies is possible. The series GS 60 – GS 150 has, like all power supplies from ADL, an extreme fast, automatic Arc-handling. The operation of the power sup-plies is easy and save.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

Active Frontpanel

Rear view

Frontpanel with Status LEDs

11

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Type DC-Output Order-No.

GS 60/800 6kW 800V 10A 03Z290GS 80/800 8kW 800V 17A 03Z340GS 100/800 10kW 800V 17A 03Z390GS 120/800 12kW 800V 20A 03Z440GS 150/800 15kW 800V 25A 03Z490

Variations

Options and Accessories Order-No.

Interface AS 4 01Y001Profibus Interface 6.408 01Y101Profibus Interface 7.408 01Y151Connecting Cable for RS 232 (Profibus) 06Y005

Frontpanel active with 3 1/2 Digit Display 02Y050

Frontpanel passive with 3 1/2 Digit Display 02Y101

Status-LEDs 01Y010Plasma Control** 50Y051Second Voltage Range U1/U2** 10Y010Joule Mode * 01Y041Connector set X1/X2 GS/GSC straight 03Y020Connector set X1/X2 GS/GSC angled 03Y040

* Only with Profibus** Only with active Frontpanel

12

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Technical Data GS 60 – GS 150

GS 100/500

GS 60/800

GS 80/800

GS100/800

GS120/800

GS 150/800

Nominal power 10kW 6kW 8kW 10kW 12kW 15kW

Output voltage 500V 800V

Output current 25A 10A 17A 17A 20A 25A

Control Current, voltage or power controlled

Modes of operation Manual via front panel or external via A/D interface AS 4 or Profibus

Set point 0…100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automatically

Delay time: 6µs up to 10ms, automatically

Indication 3½-digit display for current, voltage and power

Noise emission LpA < 70db (A)

Mains connection 3 x 400V, +5/-10%, 50/60Hz, PE

Power consumption 11kVA 6,6kVA 9kVA 11kVA 13,2kVA 16,5kVA

Fusing 20A 16A 16A 20A 25A 25A

Cooling Forced air, maximum ambient temperature 40° C

Size 19“, 3HU (132,5mm) 570mm deep

Weight 29kg 27kg 29kg 29kg 29kg 31kg

Mains cable 4 x 2,5mm² 4 x 1,5mm² 4 x 1,5mm² 4 x 2,5mm² 4 x 4mm² 4 x 4mm²

Output cable

RG 213U or

3 x 4 mm² 3 x 1,5mm² 3 x 2,5mm² 3 x 2,5mm² 3 x 2,5mm² 3 x 4mm²

13

Luftgekühlte DC-Stromversorgungen Air-cooled Power Supplies

Manufacturing Line of ADL Power Supplies ... PCB-Mounting Department

14

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

DC-Stromversorgungen GX 50 – GX 150

GX-Sputterstromversorgungen sind in der Lage, bis zu 80.000 Arcs pro Sekunde automatisch zu löschen. Die extreme Leistungsfähigkeit, kombi-niert mit kleinen Abmessungen, sind herausra-gende Kennzeichen der Serie GX. Die Geräte kön-nen mit voller Nennleistung ohne Einschränkung der Einschaltdauer betrieben und auch parallel geschaltet werden.

***Highlights

* Output power 5 - 15 kW

* Water cooling

* 1/2 19“–case, 3 HU

* Floating output

* Joule mode

* Automatic Arc-Handling

DC-Power SuppliesGX 50 – GX 150

GX-Sputtering Power Supplies are able to elimi-nate up to 80.000 Arcs per second automatically. This extreme capability combined with the small size of the power supply is outstanding and significant for the series GX. The power supplies can be operated with full nominal power without limitation of the duty cycle and they can also be switched in parallel.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

GX open

GX rear view

GX with Status LEDs

15

Type DC-Output Order-No.

GX 50/250 5kW 250V 50A 07Z010

GX 50/800 5kW 800V 14A 07Z005

GX 60/800 6kW 800V 15A 07Z040

GX 80/800 8kW 800V 20A 07Z090GX 80/1000 8kW 1000V 16A 07Z099

GX 100/400 10kW 400V 38A 07Z141GX 100/600 10kW 600V 30A 07Z142GX 100/800 10kW 800V 25A 07Z140GX 100/1000 10kW 1000V 20A 07Z149

GX 120/200 12kW 200V 60A 07Z151GX 120/800 12kW 800V 30A 07Z190

GX 150/800 15kW 800V 38A 07Z240GX 150/1000 15kW 1000V 30A 07Z249

Variations

Options and Accessories Order-No.

Interface AS 4 01Y001Interface AS 6 01Y061Profibus Interface 6.408 01Y001Profibus Interface 7.408 01Y151Connecting Cable for RS 232 (Profibus) 06Y005Arc-link 10Y100GX-Status LEDs 01Y071GX-Display 01Y081Bias Voltage Control 10Y040Swagelok-Water Couplings straight 04Y020Swagelok-Water Couplings angled 04Y04019“ Mounting angled 01Y095SMC Water Connectors 04Y100GX-Connector Set X1/X2 straight 03Y220GX-Connector Set s X1/X2 angled 03Y24019“ Mounting Set Duo-GX 03Y09119“ Mounting Set Single-GX 03Y093

Harting plugs and SwagelokWater couplings straight

Duo-GX open, front view

GX Blind case

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

16

Technical Data GX 50 – GX 150

GX 50/250

GX 50/800

GX 60/800

GX 80/800

GX 80/1000

GX 100/400

GX 100/600

Nominal power 5kW 5kW 6kW 8kW 8kW 10kW 10kW

Output voltage 250V 800V 800V 800V 1000V 400V 600V

Output current 50A 14A 15A 20A 16A 38A 30A

Control Current, voltage or power controlled

Modes of operation External via A/D interface AS 4, AS 6, AS 4 F or Profibus

Set point 0 ... 100 % of nominal current, voltage or power

Output accuracy +/- 1 % of nominal value for current, voltage and power

Arc-suppression Quenching time: 6µs up to 3ms, automatically

Delay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection 3 x 400V, +/-10 %, 50/60Hz

Power consumption 6kVA 6kVA 6,6kVA 9kVA 9kVA 11kVA 11kVA

Fusing 3 x 16A 3 x 16A 3 x 16A 3 x 20A 3 x 20A 3 x 20A 3 x 20A

CoolingWater, > 1,5 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection Swagelok B-QC 6 …

Cooling capability of water

300W 300W 300W 400W 400W 500W 500W

Cooling capability of air 45W 45W 45W 50W 50W 50W 50W

Size½ 19“, 3HU (130mm) x 520mm deep

(without plug), 590mm deep (with plug)

Weight 21 kg 21 kg 21 kg 23 kg 23 kg 23kg 23 kg

Mains cable4 x

1,5mm²4 x

1,5mm²4 x

1,5mm²4 x

2,5mm²4 x

2,5mm²4 x

2,5mm4 x

2,5mm²

Output cable3 x

10mm²3 x

1,5mm²3 x

1,5mm²3 x

2,5mm²3 x

2,5mm²3 x

6mm²3 x

6mm²

Mains connection (X2) Harting Han-Modular Compact

Harting Han-Modular Compact

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

DC-connection (X1)

17

Technical Data GX 50 – GX 150

GX 100/800

GX 100/1000

GX 120/200

GX 120/800

GX 150/800

GX 150/1000

Nominal power 10kW 10kW 12kW 12kW 15kW 15kW

Output voltage 800V 1000V 200V 800V 800V 1000V

Output current 25A 20A 60A 30A 38A 30A

Control Current, voltage or power controlled

Modes of operation External via A/D interface AS 4, AS 6, AS 4 F or Profibus

Set point 0 ... 100 % of nominal current, voltage or power

Output accuracy +/- 1 % of nominal value for current, voltage and power

Arc-suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection 3 x 400V, +/-10 %, 50/60Hz

Power consumption 11kVA 11kVA 13,2kVA 13,2kVA 16,5kVA 16,5kVA

Fusing 3 x 20A 3 x 20A 3 x 25A 3 x 25A 3 x 25A 3 x 25A

CoolingWater, > 1,5 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection Swagelok B-QC 6 …

Cooling capability of water 500W 500W 600W 600W 750W 750W

Cooling capability of air 50W 50W 60W 60W 60W 60W

Size½ 19“, 3HU (130mm) x 520mm deep

(without plug), 590mm deep (with plug)

Weight 23 kg 23 kg 23kg 23kg 25 kg 25kg

Mains cable 4 x 2,5mm² 4 x 2,5mm² 4 x 4mm² 4 x 4mm² 4 x 4mm² 4 x 4mm²

Output cable 3 x 4mm² 3 x 4mm² 3 x 16mm² 3 x 6mm² 3 x 6mm² 3 x 6mm²

Mains connection (X2) Harting Han-Modular Compact

DC-connection (X1) Harting Han-Modular Compact

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

18

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

DC-Stromversorgungen GSW 100 – GSW 300

Die Ausgangsleistung kann im Parallelbetrieb bis auf 240kW gesteigert werden. Mit einem speziellen Schaltungskonzept kann auf eine „Master-Slave-Verdrahtung“ verzichtet werden. Eine leistungsfähige Wasserkühlung sorgt auch in nicht klimatisierten Räumen für höchste Zu-verlässigkeit. Die Geräte können manuell über ein aktives Frontpanel oder über eine Schnitt-stelle betrieben werden. Es stehen verschiede-ne Frontpanels und Schnittstellenmodule zur Verfügung. Das extrem schnelle Arc-Handling arbeitet vollautomatisch.

***Highlights

* Output power 10 – 30kW

* Water cooling

* Magnetic valve control

* 19“–case, 3 HU

* Floating output

* Parallel operation up to 240 KW

* Automatic Arc-Handling

DC-Power Supplies GSW 100 - GSW 300

In parallel operation the output power can be increased up to 240kW. Thanks to a special cir-cuit arrangement a „Master-Slave-Wiring“ is not necessary. An efficient water cooling guaran-tees even in non-air conditioned rooms highest reliability. The power supplies can be operated manually via front panel or via interface. There are different front panels and interfaces availab-le. The super fast arc-handling works complete-ly automatically.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

GSW with active Frontpanel

GSW open

GSW rear

19

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Type DC-Output Order-No.

GSW 100/500 10kW 500V 40A 06Z010GSW 100/800 10kW 800V 20A 06Z040

GSW 100/1000 10kW 1000V 18A 06Z041

GSW 150/400 15kW 400V 80A 06Z055GSW 150/500 15kW 500V 60A 06Z060GSW 150/600 15kW 600V 50A 06Z070GSW 150/750 15kW 750V 38A 06Z080GSW 150/800 15kW 800V 30A 06Z090

GSW 150/1000 15kW 1000V 25A 06Z100

GSW 200/500 20kW 500V 70A 06Z120GSW 200/750 20kW 750V 50A 06Z135GSW 200/800 20kW 800V 40A 06Z140GSW 200/900 20kW 900V 40A 06Z145

GSW 200/1000 20kW 1000V 35A 06Z150

GSW 250/750 25kW 750V 60A 06Z180GSW 250/800 25kW 800V 50A 06Z190GSW 250/900 25kW 900V 50A 06Z195 GSW 300/500 30kW 500V 70A 06Z220GSW 300/750 30kW 750V 66A 06Z230GSW 300/800 30kW 800V 60A 06Z240

GSW 300/1000 30kW 1000V 50A 06Z260

Variations

Luftleitgehäuse mit Partikelabscheider für den Betrieb in staubiger Umgebung

Air baffle with particle separator in dusty environment

20

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Cathode Clamp Diode

Magnetic Valve

Options and Accessories Order-No.

Interface AS 4 01Y001Interface AS 6* 01Y061Profibus Interface 6.408 01Y101Profibus Interface 7.408 01Y151Connecting Cable for RS 232 (Profibus) 06Y005Arc Link 10Y100Frontpanel active with 3 1/2 Digit Display 02Y050Frontpanel passive with 3 1/2 Digit Display 02Y101Status-LEDs 01Y010Plasma Control** 50Y051Second Voltage Range U1/U2** 10Y010Swagelok-Water Couplings straight 04Y020Swagelock-Water Couplings angled 04Y040Cathode Clamp Diode 50Y001GSW-Connector Set X1/X2 straight 03Y120GSW-Connector Set X1/X2 angled 03Y140GSW-Air Baffle, 3 pieces 05Y050GSW-Mounting Hood with Crane Eye 05Y101Mains Voltage 3 x 440V 10Y025Mains Voltage 3 x 480V 10Y030Magnetic Valve Control with 24V DC-Output 04Y025

Magnetic Valvel 24V DC with Connecting Cable (2 m) 04Y030

* only with passive Frontpanel** only with active Frontpanel

Harting Plug straight

21

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Technical Data GSW 100 – GSW 300

GSW 100/500

GSW 100/800

GSW 100/1000

GSW 150/400

GSW 150/500

Nominal power 10kW 10kW 10kW 15kW 15kW

Output voltage 500V 800V 1000V 400V 500V

Output current 40A 20A 18A 80A 60A

Control Current, voltage or power controlled

Modes of operation Manual via front panel or external via A/D interface AS 4, AS 6*,

AS 4 F or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE

(Option: 3 x 440V or 3 x 480V)

Power consumption 11kVA 11kVA 11kVA 16,5kVA 16,5kVA

Fusing 3 x 20A 3 x 20A 3 x 20A 3 x 25A 3 x 25A

CoolingWater, > 3 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection Swagelok B QC-6 ...

Cooling capability of water 500W 500W 500W 680W 680W

Cooling capability of air 80W 80W 80W 80W 80W

Size 19“, 3HU x 700mm deep (without plug)

Weight 42kg 42kg 42kg 44kg 44kg

Mains cable 4 x 2,5mm² 4 x 2,5mm² 4 x 2,5mm² 4 x 4mm² 4 x 4mm²

Output cable 3 x 10mm² 3 x 2,5mm² 3 x 2,5mm² 3 x 25mm² 3 x 16mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

* Only with passive Frontpanel

22

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Technical Data GSW 100 – GSW 300GSW

150/600GSW

150/750GSW

150/800GSW

150/1000GSW

200/500

Nominal power 15kW 15kW 15kW 15kW 20kW

Output voltage 600V 750V 800V 1000V 500V

Output current 50A 38A 30A 25A 70A

Control Current, voltage or power controlled

Modes of operation Manual via front panel or external via A/D interface AS 4, AS 6*,

AS 4 F or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE(Option: 3 x 440V or 3 x 480V)

Power consumption 16,5kVA 16,5kVA 16,5kVA 16,5kVA 22kVA

Fusing 3 x 25A 3 x 25A 3 x 25A 3 x 25A 3 x 35A

CoolingWater, > 3 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection Swagelok B QC-6 ...

Cooling capability of water 600W 680W 680W 680W 950W

Cooling capability of air 80W 80W 80W 80W 150W

Size 19“, 3HU x 700mm deep (without plug

Weight 44kg 44kg 44kg 44kg 49kg

Mains cable 4 x 4mm² 4 x 4mm² 4 x 4mm² 4 x 4mm² 4 x 6mm²

Output cable 3 x 10mm² 3 x 10mm² 3 x 6mm² 3 x 4mm² 3 x 16mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

* Only with passive Frontpanel

23

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Technical Data GSW 100 – GSW 300GSW

200/750GSW

200/800GSW

200/900GSW

200/1000GSW

250/750

Nominal power 20kW 20kW 20kW 20kW 25kW

Output voltage 750V 800V 900V 1000V 750V

Output current 50A 40A 40A 35A 60A

Control Current, voltage or power controlled

Modes of operation Manual via front panel or external via A/D interface AS 4, AS 6*,

AS 4 F or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE(Option: 3 x 440V or 3 x 480V)

Power consumption 22kVA 22kVA 22kVA 22kVA 28kVA

Fusing 3 x 35A 3 x 35A 3 x 35A 3 x 35A 3 x 50A

Cooling Water, > 3 l/min, 2 to 8 Bar, < 40° CForced air, maximum ambient temperature 40° C

Water connection Swagelok B QC-6 ...

Cooling capability of water 900W 900W 900W 900W 1100W

Cooling capability of air 100W 100W 100W 100W 110W

Size 19“, 3HU x 700mm deep (without plug)

Weight 49kg 49kg 49kg 49kg 51kg

Mains cable 4 x 6mm² 4 x 6mm² 4 x 6mm² 4 x 6mm² 4 x 10mm²

Output cable 3 x 10mm² 3 x 10mm² 3 x 10mm² 3 x 6mm² 3 x 16mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

* Only with passive Frontpanel

24

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Technical Data GSW 100 – GSW 300GSW

250/800GSW

250/900GSW

300/500GSW

300/750GSW

300/800GSW

300/1000

Nominal power 25kW 25kW 30kW 30kW 30kW 30kW

Output voltage 800V 900V 500V 750V 800V 1000V

Output current 50A 50A 70A 66A 60A 50A

Control Current, voltage or power controlled

Modes of operation Manual via front panel or external via A/D interface AS 4, AS 6*,

AS 4 F or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE(Option: 3 x 440V or 3 x 480V)

Power consumption 28kVA 28kVA 33kVA 33kVA 33kVA 33kVA

Fusing 3 x 50A 3 x 50A 3 x 63A 3 x 63A 3 x 63A 3 x 63A

Cooling Water, > 3 l/min, 2 to 8 Bar, < 40° CForced air, maximum ambient temperature 40° C

Water connection Swagelok B QC-6 ...

Cooling capability of water 1100W 1100W 1300W 1300W 1300W 1300W

Cooling capability of air 110W 110W 150W 150W 150W 150W

Size 19“, 3HU x 700mm deep (without plug)

Weight 51kg 51kg 53kg 53kg 53kg 53kg

Mains cable 4 x 10mm² 4 x 10mm² 4 x 10mm² 4 x 10mm² 4 x 10mm² 4 x 10mm²

Output cable 3 x 10mm² 3 x 10mm² 3 x 16m² 3 x 16mm² 3 x 16m² 3 x 10m²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

* only with passive Frontpanel

25

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Manufacturing Line of ADL Power Supplies ... Sub-Assembly Department

26

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

DC-Stromversorgungen HX 150 - HX 300

Das äußerst kompakte Design von 1/2 19“ Breite und 5HE ist speziell für Produktionsanlagen entwickelt worden, bei denen auf Schaltschrän-ke verzichtet werden soll. Die HX verfügt über Befestigungslaschen und kann in beliebiger Einbaulage direkt in die Anlagen integriert werden. Das Display ist schwenkbar und kann vom Gerät getrennt werden. Eine leistungsfä-hige Wasserkühlung sorgt auch in nicht klima-tisierten Räumen für höchste Zuverlässigkeit. Zur Vermeidung von Kondenswasser kann ein externes Magnetventil über die integrierte Temperatursteuerung angeschlossen werden. Die Ausgangsleistung kann im Parallelbetrieb bis auf 240kW gesteigert werden. Das spezielle Schaltungskonzept erlaubt sowohl einen Mas-ter-Slave-Betrieb, als auch eine Parallelansteu-erung über Interface Combiner oder Profibus. Das extrem schnelle Arc-Handling arbeitet voll-automatisch, so daß keine Parameter eingestellt werden müssen.

***Highlights

* Output power 15kW – 30kW

* Parallel operation up to 240kW

* Water cooling

* Magnetic valve control

* Housing ventilation with integrated particle separator

* ½ 19”- case, 5 HU

* Flange mounting

* M8-female thread for crane eye

* Replaceable, rotatable display

* Automatic Arc-handling

DC-Power Supplies HX 150 - HX 300

The very compact design of ½ 19” width and 5 HU is especially designed for production plants without cabinets. The HX has mounting flanges and can be integrated into or attached to the plasma chamber in any position. The display can be swivelled and separated from the power sup-ply. An efficient water cooling ensures highest reliability even in non-air-conditioned rooms. In order to avoid condensation water an external magnetic valve can be connected via the integra-ted temperature control. The output power can be increased up to 240kW in parallel operation. The special electronic design allows master-slave-operation as well as parallel operation via Interface-Combiner or Profibus. The extreme fast Arc-Handling works completely automatic, so that no parameters have to be set.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

HX in upright position with rotatable display

27

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

HX in horizontal position with rotatable display

Options and Accessories Order-No. Interface AS 4 01Y001Interface AS 6 01Y061Profibus Interface 6.408 01Y101Profibus Interface 7.408 01Y151Connecting Cable for RS 232 (Profibus) 06Y005HX-Display 01Y100Arc-link 10Y100Bias Voltage Control 10Y035Cathode Clamp Diode 50Y001HX-Swagelok-Water Couplings straight 04Y070HX-Swagelok-Water Couplings angled 04Y080HX-Connector Set X1/X2 straight 03Y400HX-Connector Set X1/X2 angled 03Y410

Magnetic Valve 24V DC with Connector Cable (2 m) 04Y030

Type DC-Output Order-No.

HX 150/400 15kW 400V 80A 13Z010HX 150/500 15kW 500V 60A 13Z020HX 150/600 15kW 600V 50A 13Z030HX 150/800 15kW 800V 30A 13Z040HX 150/1000 15kW 1000V 25A 13Z050

HX 200/500 20kW 500V 70A 13Z100HX 200/800 20kW 800V 40A 13Z110HX 200/1000 20kW 1000V 35A 13Z120

HX 250/800 25kW 800V 50A 13Z200HX 250/1000 25kW 1000V 40A 13Z210

HX 300/800 30kW 800V 60A 13Z300HX 300/1000 30kW 1000V 50A 13Z310

HX in horizontal position, rear view

Variations

28

Technical Data HX 150 – HX 300

HX 150/400

HX 150/500

HX 150/600

HX 150/800

HX 150/1000

Nominal power 15kW 15kW 15kW 15kW 15kW

Output voltage 400V 500V 600V 800V 1000V

Output current 80A 60A 50A 30A 25A

Control Current, voltage or power controlled

Modes of operation External via A/D interface AS 4,

AS 4 F, AS 6 or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE

(Option: 3 x 440V or 3 x 480V)

Power consumption 16,5kVA 16,5kVA 16,5kVA 16,5kVA 16,5kVA

Fusing 3 x 25A 3 x 25A 3 x 25A 3 x 25A 3 x 25A

CoolingWater, > 3 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection SMC KQ2 10mm (Option: Swagelok B QC-6)

Cooling capability of water 680W 680W 680W 680W 680W

Cooling capability of air 80W 80W 80W 80W 80W

Size Width: 218mm, Height: 222mm, Length: 645mm (without plug)

Weight 35kg 35kg 35kg 35kg 35kg

Mains cable 4 x 4mm² 4 x 4mm² 4 x 4mm² 4 x 4mm² 4 x 4mm²

Output cable 3 x 25mm² 3 x 16mm² 3 x 10mm² 3 x 6mm² 3 x 4mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

29

Technical Data HX 150 – HX 300

HX 200/500

HX 200/800

HX 200/1000

HX 250/800

HX 250/1000

Nominal power 20kW 20kW 20kW 25kW 25kW

Output voltage 500V 800V 1000V 800V 1000V

Output current 70A 40A 35A 50A 40A

Control Current, voltage or power controlled

Modes of operation External via A/D interface AS 4, AS 4 F, AS 6 or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE

(Option: 3 x 440V or 3 x 480V)

Power consumption 22kVA 22kVA 22kVA 28kVA 28kVA

Fusing 3 x 35A 3 x 35A 3 x 35A 3 x 50A 3 x 50A

CoolingWater, > 3 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection SMC KQ2 10mm (Option: Swagelok B QC-6)

Cooling capability of water 950W 900W 900W 1100W 1100W

Cooling capability of air 150W 100W 100W 110W 110W

Size Width: 218mm, Height: 222mm, Length: 645mm (without plug)

Weight 37kg 37kg 37kg 39kg 39kg

Mains cable 4 x 6mm² 4 x 6mm² 4 x 6mm² 4 x 10mm² 4 x 10mm²

Output cable 3 x 16mm² 3 x 10mm² 3 x 6mm² 3 x 10mm² 3 x 10mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

30

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Technical Data HX 150 – HX 300

HX

300/800

HX

300/1000

Nominal power 30kW 30kW

Output voltage 800V 1000V

Output current 60A 50A

Control Current, voltage or power controlled

Modes of operation External via A/D interface AS 4, AS 4 F, AS 6 or Profibus

Set point 0...100% of nominal current, voltage or power

Output accuracy +/- 1% of nominal value for current, voltage and power

Arc suppression Quenching time: 6µs up to 3ms, automaticallyDelay time: 6µs up to 10ms, automatically

Indications 3 ½ digit display for Current, voltage and power (Option)

Noise emission LpA < 70db (A)

Mains connection3 x 400V, +/-10%, 50/60Hz, PE

(Option: 3 x 440V or 3 x 480V)

Power consumption 33kVA 33kVA

Fusing 3 x 63A 3 x 63A

CoolingWater, > 3 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection SMC KQ2 10mm (Option: Swagelok B QC-6)

Cooling capability of water 1300W 1300W

Cooling capability of air 150W 150W

Size Width: 218mm, Height: 222mm, Length: 645mm (without plug)

Weight 41kg 41kg

Mains cable 4 x 10mm² 4 x 10mm²

Output cable 3 x 16mm² 3 x 10mm²

Mains connection (X2) Harting Han k4/0

DC-connection (X1) Harting Han 2 MOD

31

Wassergekühlte DC-Stromversorgungen Water-cooled Power Supplies

Manufacturing Line of ADL Power Supplies ...

Final Assembly and Mechanical Department

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

Stromversorgungen für Ionenquellen

Für den Betrieb von Ionenquellen (Kaufmann und ECR) stehen verschiedene Spezialgeräte zur Verfügung, die auf Anfrage auch mit anderen Ausgangsspannungen oder Leistungen angebo-ten werden können. Alle Geräte sind wahlweise mit einer Analog-Schnittstelle oder mit Profibus ausgestattet.

Power Supplies for Ion Sources

For the Operation of ion sources (Kaufmann and ECR) special power supplies are available. On request the units can also be equipped with other output voltages or output power. All sup-plies have an analogue interface or profibus.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

Discharge

Accelerator

Neutralizer

Beam

Cathode

32

33

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

Options and Accessories Order-No.

Interface AS 4 01Y001

Profibus Interface 6.408 01Y101

Profibus Interface 7.408 01Y151

Cable for RS 232 (Profibus) 06Y005

Variations

Type DC-Output Order-No.

GG 03 Accelerator 300W 1000V 300mA 09Z001

GG 03.1 Accelerator 30W 1000V 30mA 09Z002

GG 12 Beam 1,2kW 2000V 1,0A 09Z011

GG 12.1 Beam 200W 2000V 100mA 09Z012

GIP 10 Neutralizer990W 25W 25W

33V 25V 25V

30A 1,0A 1,0A

09Z021

GIP 10.1 Neutralizer 990W 2,5W

33V 25V

30A 0,1A 09Z022

GDI 09 Discharge 900W 150V 6,0A 09Z031

GC 10 Cathode 1kW 35V 30A 09Z051

34

Technical Data

GG 03, GG 03.1 Accelerator and GG 12, GG 12.1 Beam

GG 03 GG 03.1 GG 12 GG 12.1

Nominal power 300W 30W 1,2kW 200W

Output voltage Negative, max. 1000V

Negative, max. 1000V

Positive, max. 2000V

Positive, max. 2000V

Output current 300mA 30mA 1A 100mA

Control Voltage or current controlled

Operation modes Manual via front panel or external via A/D interface AS 4 or Profibus

Setpoint 0...100 % of nominal voltage or current

Indications 3 ½ digit displays for voltage and current

Noise emission LpA < 70 db(A)

Mains connection

Power consumption

230V, +5/-10%, 50/60Hz, PE

500VA 100VA 1500VA 250VA

Cooling Forced air, max. ambient temperature 40° C.

Dimensions ½ 19,5“ slide-in, 3 HU (132,5mm), 560mm deep.

Weight 11kg

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

35

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

Technical Data GDI 09 Discharge

GDI 09 Discharge

Nominal power 900W

Output voltage 150V, floating up to 2kV

Output current 6A

Control Voltage or current controlled.

Operation modes Manual via front panel or external via A/D interface AS 4 or Profibus

Setpoint 0...100 % of nominal voltage or current

Indications 3 ½ digit displays for voltage and current

Noise emission LpA < 70 db(A)

Mains connection 230V, +5/-10%, 50/60Hz, PE, 1200VA

Cooling Forced air, max. ambient temperature 40° C

Dimensions ½ 19“ slide-in, 3 HU (132,5mm), 560mm deep

Weight 11kg

Technical Data GIP 10 and GIP 10.1 Neutralizer

Cathode

GIP 10 Discharge

Emission

GIP 10.1 Cathode Emission

Nominal power 990W 25W 25W 990W 2,5W

Output voltage 33V 25V 25V 33V 25V

Output current 30A 1A 1A 30A 0,1A

Control Emission or filament current controlled

Modes of operation Manual via frontpanel or external via A/D Interface AS 4 or Profibus

Set point 0 ...100 % of nominal emission or filament current

Indications 3 ½ digit displays for emission and filament current

Noise emission LpA < 70db(A)

Mains connection 230V, +5/-10%, 50/60Hz, PE , 1200VA

Cooling Forced air, maximum ambiente temperature 40° C

Seize ½ 19” slide-in, 3 HU (132,5 mm), 560 mm deep

Weight 11kg

36

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

Technical Data GC 10 Cathode

GC 10 Cathode

Nominal power 1kW

Output voltage 35V, floating up to 2kV

Output current 30A

Control Current, voltage or power controlled.

Operation modesManual via front panel or external via A/D interface

AS 4 or Profibus..

Setpoint 0...100 % of nominal voltage or current.

Indications 3 ½ digit displays for voltage and current.

Noise emission LpA < 70 db(A)

Mains connection230V, +5/-10%, 50/60Hz, PE

1200VA

Cooling Forced air, max. ambient temperature 40° C.

Dimensions ½ 19“ slide-in, 3 HU (132,5mm), 560mm deep

Weight 11kg

37

DC Stromversorgungen für Ionenquellen Power Supplies for Ion Sources

Manufacturing Line of ADL Power Supplies ...

Electronic Laboratory and Vacuum Coating Plant

38

Unipolar Pulsgenerator RD 300

Der Pulsgenerator RD 300 arbeitet nach dem Resonanzschaltprinzip in Verbindung mit den meisten ADL-Stromversorgungen. Durch den extrem hohen Wirkungsgrad (99,5% bei 30kW) ist das Gerät sehr kompakt und erzeugt nur eine geringe Verlustleistung von maximal 150W. Bestehende Anlagen können einfach nachge-rüstet werden, da der Generator parallel mit der DC-Stromversorgung direkt an die Kathode an-geschlossen wird. Das Gerät arbeitet mit einer fest eingestellten Frequenz von 2kHz. Mit einem externen Signalgenerator kann die Frequenz jedoch in einem Bereich von 0,2 bis 3kHz vari-iert werden. Mehrere Generatoren können über Steuerleitungen für eine automatische Synchro-nisation verbunden werden.

Unipolar Pulse Generator RD 300

The Pulse Generator RD 300 operates with a resonant switching circuit in combination with most of the ADL-Power Supplies. With an extra-ordinary efficiency (99.5 % at 30kW) the unit is very compact and the power dissipation is maxi-mum 150W. Existing plants can easily be retro-fitted, as the Pulse Generator RD 300 is directly connected in parallel with the DC-power supply to the cathode. The generator operates with a fixed frequency of 2kHz. Nevertheless, with an external signal generator this frequency can be varied between 0.2 to 3kHz. Several Pulse Gene-rators RD 300 can be connected via control line for an automatic synchronization.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

RD 300 rear view

Pulsgeneratoren Pulse Generators

***Highlights

* Output power 30kW

* Parallel operation up to 240kW

* Automatic synchronization

* Air cooling

* High efficiency

* Very compact design

* Flange mounting

39

Pulsgeneratoren Pulse Generators

Technical Data Pulse Generator RD 300

Pulse Generator RD 300

Nominal voltage 800V (DC Output voltage of power supply)

Nominal Power 30kW (DC Output of power supply)

Pulse frequency 2kHz, fixed

Pulse on time 480µS up to 490µS

Pulse off time 10µS up to 20µS

Principle of operation ZVS resonance converter

Maximum cable length 5m meters (generator/cathode)

Indications Status LEDs

Auxiliary voltage 24V DC +/- 10%, 0,06A

Cooling Forced air, maximum ambient temperature 40° C

Size 157mm width, 118mm height, 430mm length

Weight 8 kg

Compatible with the following power supplies:

Power supplies of the series GS and GSW with a maximum nominal power of 30kW

Type DC-Output Order-No.

RD 300 2kHz 800V 30kW 11Z003

Options and Accessories Order-No.

Master Oscillator OM5 50Y201

RDY Adapter 06Y110

The Master Oscillator OM5 synchronizes veryprecisely up to five Pulse Generators

40

Pulsgeneratoren Pulse Generators

Unipolar Pulsgeneratoren SD 150 – SD 300

Die Pulsgeneratoren erzeugen in Verbindung mit einer ADL DC-Stromversorgung unipolare Impulse. Die Geräte arbeiten mit einer fest ein-gestellten Frequenz von 20kHz. Mit einem exter-nen Signalgenerator kann die Frequenz in einem Bereich von 1kHz bis 40kHz variiert werden. Die Generatoren besitzen eine automatische Arc-Unterdrückung. Die Parameter für Trip-level und Pausenzeiten werden automatisch an den jeweiligen Prozess angepasst. Die übliche Programmierung durch den Benutzer ist nicht erforderlich. Mehrere Generatoren können über Steuerlei-tungen für eine Synchronisation verbunden wer-den. Die Geräte schalten sich dabei automatisch auf externe Synchronisation.

Unipolar Pulsgenerators SD 150 – SD 300

In combination with an ADL DC-power supply the pulse generators generate unipolar impulses. The pulse generators work with a fixed fre-quency of 20kHz. Thus, with an external signal generator this frequency can be varied in an area of 1kHz up to 40kHz. The pulse generators are equipped with an automatic arc suppressi-on. The parameters for Triplevel and Pulse off time are automatically adjusted to the specific processes. Programming by the user is not necessary at all. For an automatic synchronization several ge-nerators can be connected via control cables. In this case the pulse generators automatically switch to external syncronization. Customer Contact /Germany:

Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

***Highlights

* Output power 15kW, 30kW

* Parallel operation up to 240kW

* Automatic Arc-handling

* Air cooling

* Very compact design

* Floating output

SD 150 rear view

SD 300 rear view

SD 150 open front view

41

Pulsgeneratoren Pulse Generators

Technical Data SD 150

Pulse Generator SD 150

Input voltage Maximum 800V DC

Nominal current 38A

Nominal power 15kW (DC Output of power supply)

Pulse frequency 20kHz, fixed

Pulse on time 48µS

Pulse off time 2µS

Principle of operation unipolar

Arc suppression Automatic parameter setting

Input cable 3 x 6mm²

Output cable 3 x 6mm² (max. 5m)

Output inductivity Max. 10µH (cable + cathode)

Indications Status LEDs

Auxiliary voltage 24V DC +/- 10%, 1A

Cooling Forced air, maximum ambient temperature 40° C

Size 167mm width, 127mm height, 474mm length

Weight 10 kg

Compatible with the following power supplies:

GS 60 to GS 150, GX 50 to GX 150 (except all versions over 800V or over 38A)

Type DC-Output Order-No.

SD 150 20kHz 800V 15kW 11Z015

SD 300 20kHz 800V 30kW 11Z035

Options and Accessories Order-No. Master Oscillator OM20 50Y301

Variations

42

Pulsgeneratoren Pulse Generators

Technical Data SD 300

Pulse Generator SD 300

Input voltage Maximum 800V DC

Nominal current 70A

Nominal power 30kW (DC Output of power supply)

Pulse frequency 20kHz, fixed

Pulse on time 48µS

Pulse off time 2µS

Principle of operation unipolar

Arc suppression Automatic parameter setting

Input cable 3 x 16mm²

Output cable 3 x 16mm² (max. 5m)

Maximum cable length 5m (between pulse generator and cathode)

Output inductivity Max. 10µH (cable + cathode)

Indications Status LEDs

Auxiliary voltage 24V DC +/- 10%, 1,2A

Cooling Forced air, maximum ambient temperature 40° C

Size 218mm width, 130mm height, 645mm length

Weight 18 kg

Compatible with the following power supplies:

GSW 100 to GSW 300HX 150 to HX 300

(except all versions over 800V or over 70A)

43

Pulsgeneratoren Pulse Generators

Manufacturing Line of ADL Power Supplies ... Testing Department

44

Mittelfrequenz und Bipolar Pulsgenerator Middle Frequency and Bipolar Pulse Generator

Mittelfrequenzgenerator und Bipolar Pulsgenerator SB 300

Der Generator kann sowohl als Mittelfrequenz-generator zur Erzeugung eines symmetrischen Wechselstromes, als auch als Bipolarpulser für asymmetrische Rechteckimpulse verwendet werden. Mit einer speziellen Leistungsquoti-entenreglung kann die Targetlebensdauer für Dual-Magnetrons exakt symmetriert werden. Es können auch zwei unterschiedliche Target-materialien mit asymmetrischen Pulsleistungen geregelt werden. Der Quotientenregler stellt die Pulszeiten über eine Pulsbreitenmodulation (PWM) automtisch ein. Das Gerät arbeitet mit einer fest eingestellten Frequenz von 20kHz. Der Generator verfügt über eine automatische Arc-Unterdrückung. Die Parameter für Triplevel und Pausenzeiten werden automatisch an den jeweiligen Prozess angepasst. Die übliche Programmierung durch den Benutzer ist nicht erforderlich!Mehrere Generatoren können über Steuerlei-tungen für eine Synchronisation verbunden werden. Die Geräte schalten dabei automatisch auf externe Synchronisation.

Middle Frequency Generator and Bipolar Pulse Generator SB 300

The Generator can be used as middle frequency generator in order to generate symmetric AC current as well as a bipolar pulse generator to generate asymmetrical square impulses. With a special ratio power controller the target life time for dual-magnetrons can be exactly symmetrized. Further, also two different target materials can be controlled with asymmetrical pulse power. The ratio power controller sets the pulse times via pulse width modulation (PWM) automatically. The generator works with a fixed frequecy of 20kHz. The generator has an automtic Arc-suppression. The parameter for Triplevel and time-off are automatically adjusted to the chosen process. Programming by the user is not necessary. For an automatic synchronization several ge-nerators can be connected via control cables. In this case the pulse generators automatically switch to external syncronization.

Customer Contact /Germany:Jürgen Würtenberger. Customer Consultant.E-Mail: [email protected]. +49 (0) 6151 86072-40

***Highlights

* Output power 30kW, AC

* Parallel operation up to 240kW

* Ratio power controller

* Automatic Arc-handling

* Automatic synchronization

* Water cooling

* Very compact desing

* Floating output

SB 300 rear view

SB 300 front view

45

Mittelfrequenz und Bipolar Pulsgenerator Middle Frequency and Bipolar Pulse Generator

Type AC-Output Order-No.

SB 300 20kHz 800V 30kW 11Z050

Options and Accessories Order-No. SB-Swagelok-Water Couplings straight 04Y160

SB-Swagelok-Water Couplings angled 04Y170

SB-Connector Set X1/X2 straight 03Y280

SB-Connector Set X1/X2 angled 03Y290

SB 300 open rear view SB 300 open front view

46

Mittelfrequenz und Bipolar Pulsgenerator Middle Frequency and Bipolar Pulse Generator

Technical Data SB 300

Middle Frequency and Bipolar Pulse Generator SB 300

Input voltage Maximum 800V DC

Nominal power 30kW (DC output of power supply)

Nominal current +/- 70A

Pulse frequency 20kHz, fixed

Principle of operation AC, bipolar

Arc suppression Automatic parameter setting

Input cable 3 x 16mm²

Output cable 3 x 16mm² (max. 5m)

Maximum cable length 5m (between pulse generator and cathode)

Output inductivity Max. 10µH (cable + cathode)

Indications Status LEDs

Auxiliary voltage 24V DC +/- 10%, 1,5A

CoolingWater, > 1,5 l/min, 2 to 8 Bar, < 40° C

Forced air, maximum ambient temperature 40° C

Water connection SMC KQ2 10mm (Option: Swagelok B QC-6)

Size 218mm width, 130mm height, 645mm length(without plug)

Weight 22kg

Compatible with the following power supplies:

GSW 100 to GSW 300HX 150 to HX 300

(except all versions over 800V or over 70A)

47

Mittelfrequenz und Bipolar Pulsgenerator Middle Frequency and Bipolar Pulse Generator

The Shipping of ADL Power Supplies ...

Shipping Department and Cooling Technique

48

Zubehör Accessories

Schnittstellen Interfaces

AS 4 Order-No. 01Y001Analogschnittstelle (0-10V für Istwerte und Sollwert), Steuerein-gänge (24V/DC), Statusausgänge (Relais).

AS 4 F Order-No. 01Y021Analogschnittstelle wie AS4, aber mit schnellerer Signalverarbei-tung und Sonderfunktionen.

AS 6* Order-No. 01Y061Analogschnittstelle wie AS4, aber mit drei Sollwerteingängen für gleitende U-, I-, P-Regelung.

* nicht für alle Geräte geeignet.

Profibus Order-No. 01Y151Zur Anbindung an den Profibus DP.

Interface Combiner

AM2 Order-No. 50Y211Parallelbetrieb von zwei Strom-versorgungen mit Analogschnitt-stelle AS4.

AM3 Order-No. 50Y231Parallelbetrieb von drei Stromver-sorgungen mit Analogschnittstelle AS4.

Master Oscillator

OM5 Order-No. 50Y201Synchronisation von 2 bis 5 Puls-generatoren vom Typ RD300.

OM20 Order-No. 50Y301Synchronisation von 2 bis 5 Puls-generatoren vom Typ SD150 oder SD300.

Interface Combiner

Master Oscillator

AM2Parallel operation of two power supplies with analogue interface AS 4.

AM3Parallel operation of three power supplies with analogue interface AS 4.

Weitere Schnittstellen auf Anfrage

Other interfaces on request.

OM5Synchronization of 2 up to 5 pulse generators, type RD 300.

OM20Synchronization of 2 up to 5 pulse generators, types SD 150 or SD 300.

AS 4Analogue interface (0-10V for actual values and set value), control inputs (24V/DC), status outputs, (relay).

AS 4 FAnalogue interface, like AS 4, but with faster signal processing and special functions.

AS 6*Analogue interface like AS 4, but with three set values, inputs for a gliding U-,I-,P-control.

* not available for all power supplies.

ProfibusTo connect to the Profibus DP.

49

Zubehör Accessories

Magnetventil

Zur Steuerung der Kühlwassertemperatur bei Geräten mit integrierter Magnetventilsteuerung.

Magnetic Valve

For controlling the temperature of the cooling water for power supplies with integrated magnetic valve control.

Stecker / Plugs

GS 50 - GS 150 (Netzeingang und DC-Ausgang)

GS 50 - GS 150 (Mains input and DC-output)

GX 50 - GX 150 (Netzeingang und DC-Ausgang)

GX 50 - GX 150 (Mains input and DC-output)

GSW 100 – GSW 300 und HX 150 – HX 300 (Netzeingang und DC-Ausgang)

GSW 100 – GSW 300 und HX 150 – HX 300 (Mains input and DC-output)

KühlwasserkupplungenWater couplings

Beidseitig schließende Schnellkupplun-gen jeweils für Vor- und Rücklauf

Water couplings, closing at both ends, for reloading and return flow

Order-No. 03Y020 Order-No. 03Y040

Order-No. 03Y220 Order-No. 03Y240

Order-No. 03Y120 Order-No. 03Y140

Order-No. 04Y020 Order-No. 04Y040

Order-No. 04Y030

50

Zubehör Accessories

Remote Control

RC4 Order-No. 06Y401Manuelle Fernbedienung für alle DC-Stromversorgungen.

Kathodenfreilaufdiode

D300 Order-No. 50Y001Vehindert das Umschwingen der Spannung während der Arc-Löschung.

Manual remote control for all DC-Power Supplies.

Cathode Clamp Diode

D300Prevents the overshooting of the voltage during Arc-suppression.

Kabel / Cable JZ-600-Y-CY

Spezialkabel zur Verbindung der Strom-versorgungen mit Kathoden oder anderen Lasten. Das Kabel ist für alle DC-Stromver-sorgungen und Pulsgeneratoren bis zu einer Ausgangsspannung von 1000V geeignet.

Special cable to connect the power supplies with the cathode or other loads. The cable can be used for all power supplies and pulse generators for an output voltage up to 1000V.

Cu-Litze blank, feindrähtigPVC-AderisolationAbschirmgeflecht aus verzinnten CU-DrähtenPVC-Außenmantel

Bare copper, fine wiredSpecial PVC core insulationBraided screen of tinned Cu wiresSpecial PVC outer sheath

Aufbau / Cable structure

Core cross-sectionmm²

Outside diametermm

Weight kg/km Order-No.

2 x 1,5 10,4 162 E015-00192 x 2,5 11,8 272 E015-02242 x 4 14,2 306 E015-01942 x 6 15,9 420 E015-0193

2 x 10 18,3 845 E015-0217

2 x 16 22,8 1150 E015-0204

Technical DataTemperature range: -5º C bis +80º C

Nominal voltage: 0,6/1kV

Test voltage: 4000VMinimum bending radius: 10 x Outside diameter

Yeu & Jerng Techn Inc. c/o: No. 96, Tahsiang StreetSanmin Li32051 Chungli City Taiwan R.O.C.

ADL (SenVac) Korea408-2 Ho, Green Plaza 644-5Whaseodong Paldalgu, Suwon City442-150, Kyungki-doKorea

FergutecP.O. Box 6395550 AP ValkenswaardThe Netherlands

Realization

Text: ADL

Graphic and print:CityDruck Kerkmann & Kother oHgwww.citydruck.de

Photos: Dirk Uebele / Fotodesignerwww.uebele.net

Fotos Cover: © yoshiyayo-Fotolia.com, ©scanrail-Fotolia.com, ©rulan-Fotolia.com,©vrd-Fotolia.com

Foto Page 50: © Helukabel

Information in this catalogue is subject to changes. The process of continually improving our products range and developing new products leads to changes in content. For new designs or further information, please request.

Ingenieurbüro Wurczinger EngineeringAlte Straße 31D-61118 Bad Vilbel

SenVac GmbH Anlagenbau und KomponentenPfingstweide 20D-61169 Friedberg

MST Hofmann GmbHSandstraße 5D-63589 Linsengericht

robekoRolf SchäferBeschichtungskomponentenAckerwiese 14D-67728 Münchweiler

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Imprint

ADLAnaloge und DigitaleLeistungselektronik GmbHBunsenstraße 30D 64293 DarmstadtTel. +49 (0) 6151 860 720Fax +49 (0) 6151 860 7271

E-Mail: [email protected]

Executive Board:Michael HoubenEntry in County Court:Amtsgericht Darmstadt, HRB 53147Tax Specifics:Sales Tax Identification Number: DE 152372674Tax Payer‘s Account Number: 007 228 03963

Customer Contact:Jürgen Würtenberger, Customer ConsultantE-Mail: [email protected]

All rights reserved. The text, images, graphics, in the catalogue of ADL Analoge und Digitale Leistungs-elektronik GmbH are all subject to copyright and other intellectual property protection. These objects may not be copied for commercial use or distribution, nor may these objects be modified or reposted to other sites. Copyright © 2012 ADL Analoge und Digitale Leistungselektronik GmbH. All rights reserved.

ADL Analoge & DigitaleLeistungselektronik GmbH

Bunsenstraße 30D 64293 Darmstadt / GermanyTel. +49 (0) 6151 86 072-0Fax +49 (0) 6151 86 072-70

www.adl-gmbh.com

Customer Contact /Germany:

Jürgen Würtenberger. Customer Consultant.

E-Mail: [email protected]

Tel. +49 (0) 6151 86072-40